Module also offered within study programmes:
General information:
Name:
MEMS and nanotechnology
Course of study:
2013/2014
Code:
RMS-2-305-MD-s
Faculty of:
Mechanical Engineering and Robotics
Study level:
Second-cycle studies
Specialty:
Mechatronic Design
Field of study:
Mechatronics with English as instruction languagege
Semester:
3
Profile of education:
Academic (A)
Lecture language:
English
Form and type of study:
Full-time studies
Course homepage:
 
Responsible teacher:
dr inż. Mańka Michał (mmanka@agh.edu.pl)
Academic teachers:
dr inż. Mańka Michał (mmanka@agh.edu.pl)
dr hab. inż, prof. AGH Martowicz Adam (adam.martowicz@agh.edu.pl)
Module summary

Description of learning outcomes for module
MLO code Student after module completion has the knowledge/ knows how to/is able to Connections with FLO Method of learning outcomes verification (form of completion)
Skills
M_U001 is able to work in the teams, prepare project's documentation and present the results of the work Presentation,
Report
M_U002 is able to design and simulate of some MEMS devices MS2A_U07 Report,
Execution of laboratory classes
M_U003 is able to used CAE tools for MEMS designing process; is able to verify behaviour of the designed structures with CAE tools MS2A_U07 Report,
Execution of laboratory classes
Knowledge
M_W001 has basic knowledge about changes in physical phenomena with the change of scale from macro and mezo scale to mikro and nano scale MS2A_W01 Activity during classes,
Test,
Participation in a discussion,
Test results
M_W002 knows environmental requirements for MEMS and NEMS manufacturing and can define those requirements for given process MS2A_W07 Activity during classes,
Test,
Participation in a discussion,
Test results
M_W003 knows methods and techniques used in MEMS manufacturing for material deposition, is able to choose proper method of deposition for given materials MS2A_W01 Activity during classes,
Participation in a discussion,
Execution of exercises,
Test results
M_W004 knows methods and techniques of material removing in the process of the MEMS manufacturing, is able to choose proper method and set its parameters for given materials MS2A_W03 Activity during classes,
Test,
Participation in a discussion,
Test results
M_W005 knows method and techniques of lithography process, materials and equipment used during process MS2A_W03 Activity during classes,
Participation in a discussion,
Test results
M_W006 knows method of MEMS testing Activity during classes,
Test,
Test results
FLO matrix in relation to forms of classes
MLO code Student after module completion has the knowledge/ knows how to/is able to Form of classes
Lecture
Audit. classes
Lab. classes
Project classes
Conv. seminar
Seminar classes
Pract. classes
Others
Zaj. terenowe
Zaj. warsztatowe
E-learning
Skills
M_U001 is able to work in the teams, prepare project's documentation and present the results of the work - - + - - - - - - - -
M_U002 is able to design and simulate of some MEMS devices - - + - - - - - - - -
M_U003 is able to used CAE tools for MEMS designing process; is able to verify behaviour of the designed structures with CAE tools - - + - - - - - - - -
Knowledge
M_W001 has basic knowledge about changes in physical phenomena with the change of scale from macro and mezo scale to mikro and nano scale + - - - - - - - - - -
M_W002 knows environmental requirements for MEMS and NEMS manufacturing and can define those requirements for given process + - - - - - - - - - -
M_W003 knows methods and techniques used in MEMS manufacturing for material deposition, is able to choose proper method of deposition for given materials + - - - - - - - - - -
M_W004 knows methods and techniques of material removing in the process of the MEMS manufacturing, is able to choose proper method and set its parameters for given materials + - - - - - - - - - -
M_W005 knows method and techniques of lithography process, materials and equipment used during process + - - - - - - - - - -
M_W006 knows method of MEMS testing + - - - - - - - - - -
Module content
Lectures:
  1. Lithography process in MEMS manufacturing

    Masked lithography.
    Photoresist deposition.
    Developing of the photoresist.
    Maskless lithography.
    High profile structures.

  2. Material romoval methods in MEMS manufacturing

    Isotropic vs anisotropic etching.
    Wet etching methods.
    Dry etching methods.
    Chemical etching.
    Physical etching.

  3. Influeance of scale of the objects on observed phenomena

    Influence of some physical phenomena on micro mechanisms.
    Properties of materials in MEMS and NEMS systems

  4. Enviromental requirements of MEMS manufacturing process

    Environmental requirements of the MEMS manufacturing.
    Cleanroom technology.
    Process environmental requirements.

  5. Layer deposition methods in MEMS manufacturing

    Bulk micro-machining.
    Surface micro-machining.
    Methods of materials’ deposition.
    Mono-crystals manufacturing.
    Metal layer deposition. Sputtering
    Enhanced methods of material deposition.

  6. Packaqging and testing of the MEMS

    MEMS packaging methods
    Influence of the environment on the MEMS/NEMS system.
    MEMS testing methods

Laboratory classes:
  1. Getting started with CoventorWare -CAE enviroment
  2. Mask designing methods in CoventorWare
  3. FEA 3d models of MEMS systems in CoventorWare
  4. MEMS simulation in CoventorWare with multiphysics approach
  5. Getting started with MEMS CAD/CAE tools
Student workload (ECTS credits balance)
Student activity form Student workload
Summary student workload 60 h
Module ECTS credits 2 ECTS
Participation in lectures 15 h
Participation in laboratory classes 15 h
Preparation for classes 20 h
Realization of independently performed tasks 5 h
Preparation of a report, presentation, written work, etc. 5 h
Additional information
Method of calculating the final grade:

60% laboratories, 40% lectures’ test, both elements should be positive

Prerequisites and additional requirements:

Prerequisites and additional requirements not specified

Recommended literature and teaching resources:

Gad-el-Hak I.:The MEMS Handbook,CRC Press,2001
Bhushan: Handbook of Nanotechnology, Springer, 2003
Gianchandani, Y.B, Tabata O., Zappe H, Comprehensive Microsystems,Elsevier, 2007

Scientific publications of module course instructors related to the topic of the module:

Additional scientific publications not specified

Additional information:

None