General information:
Code:
UBPJO-246
Name:
Advanced methods in Scanning Electron Microscopy
Profile of education:
Academic (A)
Lecture language:
English
Semester:
Fall
Course homepage:
 
Responsible teacher:
dr inż. Tokarski Tomasz (tokarski@agh.edu.pl)
Academic teachers:
dr inż. Tokarski Tomasz (tokarski@agh.edu.pl)
Module summary

The course presents principles of EDS and EBSD analysis, optimal parameter selections in relation to measurement quality and speed. Advanced techniques such as TKD, ECCI, and DIC are also presented.

Description of learning outcomes for module
MLO code Student after module completion has the knowledge/ knows how to/is able to Connections with FLO Method of learning outcomes verification (form of completion)
Skills
M_U001 Is able to prepare samples for the microstructure microanalysis - Activity during classes
M_U002 Posses basic skills of operation and alignment of scanning electron microscope. - Completion of laboratory classes,
Activity during classes
M_U003 Is able to select correct imaging mode and parameters of electron microscope with respect to the investigated material and applied analytical technique. - Completion of laboratory classes,
Activity during classes
Knowledge
M_W001 Knowledge of basics of a scanning electron microscope its capabilities and limitations. - Examination,
Activity during classes
M_W002 Knowledge of the image contrast formation in scanning electron microscopy and application of analytical techniques: X-Ray spectroscopy (EDS) and Electron backscatter diffraction (EBSD). - Examination,
Activity during classes
M_W003 Knowledge of advanced SEM analytical techniques: transmission Kikuchi diffraction (TKD), defects imaging ECCI, stress measurements. - Examination,
Activity during classes
FLO matrix in relation to forms of classes
MLO code Student after module completion has the knowledge/ knows how to/is able to Form of classes
Lecture
Audit. classes
Lab. classes
Project classes
Conv. seminar
Seminar classes
Pract. classes
Zaj. terenowe
Zaj. warsztatowe
Others
E-learning
Skills
M_U001 Is able to prepare samples for the microstructure microanalysis - - + - - - - - - - -
M_U002 Posses basic skills of operation and alignment of scanning electron microscope. - - + - - - - - - - -
M_U003 Is able to select correct imaging mode and parameters of electron microscope with respect to the investigated material and applied analytical technique. - - + - - - - - - - -
Knowledge
M_W001 Knowledge of basics of a scanning electron microscope its capabilities and limitations. + - + - - - - - - - -
M_W002 Knowledge of the image contrast formation in scanning electron microscopy and application of analytical techniques: X-Ray spectroscopy (EDS) and Electron backscatter diffraction (EBSD). + - + - - - - - - - -
M_W003 Knowledge of advanced SEM analytical techniques: transmission Kikuchi diffraction (TKD), defects imaging ECCI, stress measurements. + - + - - - - - - - -
Module content
Lectures:
Advanced methods in Scanning Electron Microscopy

The course encompasses advanced topics in the field of modern scanning electron microscopy and additional systems dedicated for chemical composition analysis EDS, WDS and crystallography EBSD. Lectures topics will cover analytical possibilities of modern microscopes in relation to industrial and fundamental investigations (the measurement of microstructure parameters of solid object – grain size, degree of deformation, phase type and distribution). Fundamentals of electron – material interaction, qualitative and quantitative description using the Monte Carlo simulation will be introduced as a background for following topics:
1. The principles of EDS microanalysis, possibilities and limitations,
2. optimal microscopy parameter selections in relation to measurement quality and speed, low-energy electron analysis,
3. the measurement principles of the EBSD technique, possibilities and limitations, optimal parameter selection of measurement data acquisition,
4. the application of transmission Kikuchi diffraction (TKD) during analysis of nano materials,
5. advanced methods in data analysis based on crystallography orientation maps and Hough’s transform,
6. measurement methods using the diffraction contrast in defect imaging – ECCI technique,
7. methods of stress measurement using the hole drilling method in microscale and application of the EBSD technique combined with digital image correlation DIC,
8. sample preparation methods in relation to EDS and EBSD imaging and analysis.

Laboratory classes:
Advanced methods in Scanning Electron Microscopy

During laboratory classes, topic presented during lectures, will be practiced with the use of various metallic samples. Particular emphasis will be placed on following topics:
1. Proper sample preparation techniques and its impact on measurement quality,
2. proper microscope aligning,
3. selection of proper microscope operating condition with respect to investigated materials,
4. selection of correct imaging conditions, applying optimized parameters for EDS and EBSD detector data acquisition,
5. limitations of EDS and EBSD method presented at selected metallic samples,
6. material and system based limitations of the spatial resolution, speed of analysis and measurement uncertainty.

Student workload (ECTS credits balance)
Student activity form Student workload
Summary student workload 120 h
Module ECTS credits 4 ECTS
Participation in lectures 30 h
Participation in laboratory classes 30 h
Preparation of a report, presentation, written work, etc. 20 h
Preparation for classes 20 h
Examination or Final test 2 h
Realization of independently performed tasks 18 h
Additional information
Method of calculating the final grade:

The final grade is the weighted average form final exam (60%) and laboratory activity (40%)

Prerequisites and additional requirements:

Basic understanding of microscopy techniques, electron-matter interaction physics, materials engineering and/or solid state physics.

Recommended literature and teaching resources:

Adam J. Schwartz, Mukul Kumar, Brent L. Adams · David P. Field Editors, Electron Backscatter Diffraction in Materials Science, 2009, Springer
Patrick Echlin, Handbook of Sample Preparation for Scanning Electron Microscopy and X-Ray Microanalysis, 2009th Edition, Springer
Patrick Echlin, C.E. Fiori, Joseph Goldstein, David C. Joy, Dale E. Newbury, Advanced Scanning Electron Microscopy and X-Ray Microanalysis, Springer

Scientific publications of module course instructors related to the topic of the module:

Additional scientific publications not specified

Additional information:

None